Producing in collaboration with INPHOTEC photonic integrated circuits through the unique Italian silicon 6- inch CMOS-compatible line in a 700 sqm clean room with class 100, 1000 bays . The line includes three technology platforms: silicon photonics, glass and nitride, hybridization. The infrastructure has state of the art gas delivery semi standard, gas system abatements, water plant producing high pure18 Mohm/cm2 water, semi-standard ASTM 5127-07. Processes include deposition of dielectric materials, deposition of metals and solders, etching, E-beam lithography, optical lithography, with the related metrology for the fabrication of SOI, Si3N4, SiON and SiO2:Ge passive waveguides and SiOB (silicon optical bench) substrates.